MEMS 系統設計分析

MEMS 設計工具領導者

MEMS Pro is a flexible, powerful, easy-to-use CAD tool suite for the design and analysis of micro-electro-mechanical systems (MEMS) and other types of sensors and actuators.


System-level Tools

MEMS Pro provides system-level design capability through fully hierarchical schematic capture and behavioral level simulation of MEMS devices with electronics and packaging.

MEMS devices are represented with multi-physics signals in mechanical, thermal, magnetic, fluidic, optical, and electro-static domains. MEMS models are represented in high level behavioral languages such as Verilog-A, SPICE, C-code, or data tables.

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Modeling Tools

Compact Model Builder automatically generates behavioral models ready for system simulation with electronics and packaging from 3D data from finite element analysis programs.
Complex, finite element models involving a large number of degrees of freedom are reduced to behavioral models with a few master degrees of freedom. Users can also create their own models from analytical equations and the tool generates simulationready descriptions in a variety of popular formats.

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Layout Editing

MEMS Pro’s physical design environment includes a fully hierarchical and full
custom mask editor engineered for MEMS and IC design. The program uses an intuitive interface and provides specific MEMS-related capabilities that greatly reduce layout time.

A curve generator allows designers to create MEMS primitives, such as splines, fillets and general equation-based curves.

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3D Solid Modeler

An easy to use GUI permits designers to enter fabrication process steps and sequences. Surface and bulk micromachining process steps such as material deposit, etch, mechanical polish, diffusion, growth, electroplating and wafer manipulation steps are supported.

The 3D model may be scaled and a subset of mask layers may be selected for view. Models can be viewed with rotations, zooms, and preset views.

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Cross Section Viewer

Cross Section Viewer displays a cutaway view in the z-dimension based on a user-specified cut line. Model displays may be animated to show process sequences.
Material properties and boundary conditions may be defined and can be transferred along with the 3D model to third party 3D analysis programs for further simulation.

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Foundry Modules

A variety of foundry-specific modules are fully integrated with SoftMEMS’ tool suites to ensure process compatibility and manufacturability with the world’s leading MEMS foundries.

Foundry modules include mask and device design rules, mask layer descriptions, device descriptions for extraction, process parameters and material properties, and foundry fabrication process sequence descriptions.